dc.contributor.author | Govoreanu, Bogdan | |
dc.contributor.author | Degraeve, Robin | |
dc.contributor.author | Zahid, Mohammed | |
dc.contributor.author | Nyns, Laura | |
dc.contributor.author | Cho, Moon Ju | |
dc.contributor.author | Kaczer, Ben | |
dc.contributor.author | Jurczak, Gosia | |
dc.contributor.author | Kittl, Jorge | |
dc.contributor.author | Groeseneken, Guido | |
dc.date.accessioned | 2021-10-17T22:30:49Z | |
dc.date.available | 2021-10-17T22:30:49Z | |
dc.date.issued | 2009 | |
dc.identifier.issn | 0167-9317 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15384 | |
dc.source | IIOimport | |
dc.title | Understanding the potential and limitations of the HfAlO as interpoly dielectric in floating gate flash memory | |
dc.type | Journal article | |
dc.contributor.imecauthor | Govoreanu, Bogdan | |
dc.contributor.imecauthor | Degraeve, Robin | |
dc.contributor.imecauthor | Nyns, Laura | |
dc.contributor.imecauthor | Kaczer, Ben | |
dc.contributor.imecauthor | Jurczak, Gosia | |
dc.contributor.imecauthor | Groeseneken, Guido | |
dc.contributor.orcidimec | Nyns, Laura::0000-0001-8220-870X | |
dc.contributor.orcidimec | Kaczer, Ben::0000-0002-1484-4007 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 1807 | |
dc.source.endpage | 1811 | |
dc.source.journal | Microelectronic Engineering | |
dc.source.issue | 7_9 | |
dc.source.volume | 86 | |
imec.availability | Published - open access | |
imec.internalnotes | INFOS 2009 | |