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Understanding the potential and limitations of the HfAlO as interpoly dielectric in floating gate flash memory
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Authors
Govoreanu, Bogdan
;
Degraeve, Robin
;
Zahid, Mohammed
;
Nyns, Laura
;
Cho, Moon Ju
;
Kaczer, Ben
;
Jurczak, Gosia
;
Kittl, Jorge
;
Groeseneken, Guido
ISSN
0167-9317
Issue
7_9
Journal
Microelectronic Engineering
Volume
86
Title
Understanding the potential and limitations of the HfAlO as interpoly dielectric in floating gate flash memory
Publication type
Journal article
Embargo date
9999-12-31
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