Effect of PAG distribution on ArF and EUV resist performance

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Authors

Gronheid, Roel; Rathsack, Benjamin; Bernard, Sophie; Vaglio Pret, Alessandro; Nafus, Kathleen; Hatakeyama, Shinichi

ISSN

0914-9244

Issue

1_6

Journal

Journal of Photopolymer Science and Technology

Volume

22

Title

Effect of PAG distribution on ArF and EUV resist performance

Publication type

Journal article

Embargo date

9999-12-31

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