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Interfacial reactions and phase stabilization of doped hafnia and higher-k oxides: the added value of GATR-FTIR

dc.contributor.authorHardy, An
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorFavia, Paola
dc.contributor.authorBender, Hugo
dc.contributor.authorFranquet, Alexis
dc.contributor.authorVan den Rul, Heidi
dc.contributor.authorVan Bael, Marlies
dc.contributor.authorD'Haen, Jan
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorD'Olieslaeger, Marc
dc.contributor.authorHeyns, Marc
dc.contributor.authorKittl, Jorge
dc.contributor.authorDetavernier, Christophe
dc.contributor.authorMullens, Jules
dc.date.accessioned2021-10-17T22:44:29Z
dc.date.available2021-10-17T22:44:29Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15440
dc.sourceIIOimport
dc.titleInterfacial reactions and phase stabilization of doped hafnia and higher-k oxides: the added value of GATR-FTIR
dc.typeOral presentation
dc.contributor.imecauthorHardy, An
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecHardy, An::0000-0002-5012-0356
dc.contributor.orcidimecD'Olieslaeger, Marc::0000-0001-7951-8037
dc.source.peerreviewno
dc.source.conferenceMRS Spring Meeting Symposium C: CMOS Gate-Stack Scaling - Materials, Interfaces, and Reliability Implications
dc.source.conferencedate14/04/2009
dc.source.conferencelocationSan Francisco, CA US
imec.availabilityPublished - imec
imec.internalnotesPaper C11.3


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