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Integrated CMOS+MEMS : the future ?

dc.contributor.authorHaspeslagh, Luc
dc.date.accessioned2021-10-17T22:45:28Z
dc.date.available2021-10-17T22:45:28Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15444
dc.sourceIIOimport
dc.titleIntegrated CMOS+MEMS : the future ?
dc.typeOral presentation
dc.contributor.imecauthorHaspeslagh, Luc
dc.source.peerreviewno
dc.source.conference3rd STIMESI Workshop on MEMS and Microsystems Research and Teaching
dc.source.conferencedate13/11/2009
dc.source.conferencelocationPrague Czech Republic
imec.availabilityPublished - imec


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