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Design and analysis of an in-plane resonant nano-electro-mechanical sensor for sub-attogram-level molecular mass-detection

dc.contributor.authorHassani, Faezeh A.
dc.contributor.authorCobianu, Cornel
dc.contributor.authorArmini, Silvia
dc.contributor.authorPetrescu, Violeta
dc.contributor.authorMerken, Patrick
dc.contributor.authorTsamados, Dimitrios
dc.contributor.authorIonescu, Adrian M.
dc.contributor.authorTsuchiya, Yoshishige
dc.contributor.authorMizuta, Hiroshi
dc.date.accessioned2021-10-17T22:45:44Z
dc.date.available2021-10-17T22:45:44Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15445
dc.sourceIIOimport
dc.titleDesign and analysis of an in-plane resonant nano-electro-mechanical sensor for sub-attogram-level molecular mass-detection
dc.typeProceedings paper
dc.contributor.imecauthorArmini, Silvia
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpageJ-6-5
dc.source.conferenceSolid State Devices and Materials Conference - SSDM
dc.source.conferencedate7/10/2009
dc.source.conferencelocationSendai Japan
imec.availabilityPublished - open access


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