Authors

Hauptmann, Marc; Brems, Steven; Camerotto, Elisabeth; Zijlstra, Aaldert; Doumen, Geert; Bearda, Twan; Mertens, Paul; Lauriks, Walter

Conference

35th International Conference on Micro & Nano Engineering - MNE

Title

Influence of gasification on electro-acoustical and cleaning performance of a 1 MHz nozzle system in megasonic cleaning

Publication type

Meeting abstract