Show simple item record

Ultra-high data density MEMS memory device

dc.contributor.authorHeck, John
dc.contributor.authorAdams, Don
dc.contributor.authorBelov, Nicolai
dc.contributor.authorChou, T-K.A.
dc.contributor.authorKim, B.
dc.contributor.authorMa, Q.
dc.contributor.authorRao, V.
dc.contributor.authorSeveri, Simone
dc.contributor.authorTchelepi, G.
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-17T22:46:15Z
dc.date.available2021-10-17T22:46:15Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15447
dc.sourceIIOimport
dc.titleUltra-high data density MEMS memory device
dc.typeMeeting abstract
dc.contributor.imecauthorSeveri, Simone
dc.source.peerreviewno
dc.source.conference35th International Conference on Micro- and Nano Engineering - MNE
dc.source.conferencedate28/09/2009
dc.source.conferencelocationGent Belgium
imec.availabilityPublished - imec
imec.internalnotesfile 'O-MEMS-06' on CD (full abstract) and p 36 program guide (short abstract)


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record