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High performance 70 nm germanium pMOSFETs with boron LDD implants
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Authors
Hellings, Geert
;
Mitard, Jerome
;
Eneman, Geert
;
De Jaeger, Brice
;
Brunco, David
;
Shamiryan, Denis
;
Vandeweyer, Tom
;
Meuris, Marc
;
Heyns, Marc
;
De Meyer, Kristin
ISSN
0741-3106
Issue
1
Journal
IEEE Electron Device Letters
Volume
30
Title
High performance 70 nm germanium pMOSFETs with boron LDD implants
Publication type
Journal article
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