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Experimental determination and accurate modeling of the EUV ADT flare

dc.contributor.authorHendrickx, Eric
dc.contributor.authorLorusso, Gian
dc.contributor.authorFenger, Germain
dc.contributor.authorLam, Michael
dc.contributor.authorWord, James
dc.date.accessioned2021-10-17T22:48:36Z
dc.date.available2021-10-17T22:48:36Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15456
dc.sourceIIOimport
dc.titleExperimental determination and accurate modeling of the EUV ADT flare
dc.typeProceedings paper
dc.contributor.imecauthorHendrickx, Eric
dc.contributor.imecauthorLorusso, Gian
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceInternational Symposium on Extreme Ultraviolet Lithography
dc.source.conferencedate18/10/2009
dc.source.conferencelocationPrague Czech Republic
imec.availabilityPublished - open access
imec.internalnotese-proceedings Sematech-website


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