Show simple item record

Post-direct-CMP dielectric surface copper contamination: quantitative analysis and impact on dielectric breakdown behaviour

dc.contributor.authorHeylen, Nancy
dc.contributor.authorLi, Yunlong
dc.contributor.authorKellens, Kristof
dc.contributor.authorTravaly, Youssef
dc.contributor.authorVereecke, Guy
dc.contributor.authorVolders, Henny
dc.contributor.authorTokei, Zsolt
dc.contributor.authorVersluijs, Janko
dc.contributor.authorRip, Jens
dc.contributor.authorVan Besien, Els
dc.contributor.authorCarbonell, Laure
dc.contributor.authorBeyer, Gerald
dc.contributor.authorFischer, Paul
dc.contributor.authorZhao, Larry
dc.contributor.authorSantoro, Gaetano
dc.contributor.authorCockburn, Andrew
dc.contributor.authorNguyen, Olivier
dc.date.accessioned2021-10-17T22:51:36Z
dc.date.available2021-10-17T22:51:36Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15468
dc.sourceIIOimport
dc.titlePost-direct-CMP dielectric surface copper contamination: quantitative analysis and impact on dielectric breakdown behaviour
dc.typeProceedings paper
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorLi, Yunlong
dc.contributor.imecauthorKellens, Kristof
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorVolders, Henny
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorVersluijs, Janko
dc.contributor.imecauthorRip, Jens
dc.contributor.imecauthorVan Besien, Els
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorSantoro, Gaetano
dc.contributor.imecauthorCockburn, Andrew
dc.contributor.orcidimecLi, Yunlong::0000-0003-4791-4013
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.contributor.orcidimecVan Besien, Els::0000-0002-5174-2229
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage415
dc.source.endpage429
dc.source.conferenceAdvanced Metallization Conference 2008 (AMC2008)
dc.source.conferencedate23/09/2008
dc.source.conferencelocationSan Diego, CA USA
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
17744.pdf
Size:
1.295Mb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record