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High-k dielectrics and interface passivation for Ge and III/V devices on silicon for advanced CMOS
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Authors
Heyns, Marc
;
Adelmann, Christoph
;
Brammertz, Guy
;
Caymax, Matty
;
De Jaeger, Brice
;
Delabie, Annelies
;
Eneman, Geert
;
Houssa, Michel
;
Lin, Dennis
;
Martens, Koen
;
Merckling, Clement
;
Meuris, Marc
;
Mitard, Jerome
;
Penaud, Julien
;
Pourtois, Geoffrey
;
Scarrozza, Marco
;
Simoen, Eddy
;
Sioncke, Sonja
;
Wang, Wei-E
Conference
216th ECS Meeting
Title
High-k dielectrics and interface passivation for Ge and III/V devices on silicon for advanced CMOS
Publication type
Meeting abstract
Embargo date
9999-12-31
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