dc.contributor.author | Heyns, Marc | |
dc.contributor.author | Bellenger, Florence | |
dc.contributor.author | Brammertz, Guy | |
dc.contributor.author | Caymax, Matty | |
dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | De Jaeger, Brice | |
dc.contributor.author | Delabie, Annelies | |
dc.contributor.author | Eneman, Geert | |
dc.contributor.author | Groeseneken, Guido | |
dc.contributor.author | Houssa, Michel | |
dc.contributor.author | Leonelli, Daniele | |
dc.contributor.author | Lin, Dennis | |
dc.contributor.author | Martens, Koen | |
dc.contributor.author | Merckling, Clement | |
dc.contributor.author | Meuris, Marc | |
dc.contributor.author | Mitard, Jerome | |
dc.contributor.author | Penaud, Julien | |
dc.contributor.author | Pourtois, Geoffrey | |
dc.contributor.author | Scarrozza, Marco | |
dc.contributor.author | Simoen, Eddy | |
dc.contributor.author | Van Elshocht, Sven | |
dc.contributor.author | Vandenberghe, William | |
dc.contributor.author | Vandooren, Anne | |
dc.contributor.author | Verhulst, Anne | |
dc.contributor.author | Wang, Wei-E | |
dc.date.accessioned | 2021-10-17T22:54:02Z | |
dc.date.available | 2021-10-17T22:54:02Z | |
dc.date.issued | 2009 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15475 | |
dc.source | IIOimport | |
dc.title | High mobility channel materials and novel devices for scaling of nanoelectronics beyond the Si roadmap | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Heyns, Marc | |
dc.contributor.imecauthor | Brammertz, Guy | |
dc.contributor.imecauthor | Caymax, Matty | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.imecauthor | De Jaeger, Brice | |
dc.contributor.imecauthor | Delabie, Annelies | |
dc.contributor.imecauthor | Eneman, Geert | |
dc.contributor.imecauthor | Groeseneken, Guido | |
dc.contributor.imecauthor | Houssa, Michel | |
dc.contributor.imecauthor | Leonelli, Daniele | |
dc.contributor.imecauthor | Lin, Dennis | |
dc.contributor.imecauthor | Martens, Koen | |
dc.contributor.imecauthor | Merckling, Clement | |
dc.contributor.imecauthor | Meuris, Marc | |
dc.contributor.imecauthor | Mitard, Jerome | |
dc.contributor.imecauthor | Pourtois, Geoffrey | |
dc.contributor.imecauthor | Simoen, Eddy | |
dc.contributor.imecauthor | Van Elshocht, Sven | |
dc.contributor.imecauthor | Vandooren, Anne | |
dc.contributor.imecauthor | Verhulst, Anne | |
dc.contributor.orcidimec | Brammertz, Guy::0000-0003-1404-7339 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.contributor.orcidimec | De Jaeger, Brice::0000-0001-8804-7556 | |
dc.contributor.orcidimec | Eneman, Geert::0000-0002-5849-3384 | |
dc.contributor.orcidimec | Houssa, Michel::0000-0003-1844-3515 | |
dc.contributor.orcidimec | Martens, Koen::0000-0001-7135-5536 | |
dc.contributor.orcidimec | Merckling, Clement::0000-0003-3084-2543 | |
dc.contributor.orcidimec | Meuris, Marc::0000-0002-9580-6810 | |
dc.contributor.orcidimec | Mitard, Jerome::0000-0002-7422-079X | |
dc.contributor.orcidimec | Pourtois, Geoffrey::0000-0003-2597-8534 | |
dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
dc.contributor.orcidimec | Van Elshocht, Sven::0000-0002-6512-1909 | |
dc.contributor.orcidimec | Vandooren, Anne::0000-0002-2412-0176 | |
dc.contributor.orcidimec | Verhulst, Anne::0000-0002-3742-9017 | |
dc.source.peerreview | no | |
dc.source.beginpage | 1194-A07-01 | |
dc.source.conference | High-k Dielectrics on Semiconductors with High Carrier Mobility | |
dc.source.conferencedate | 30/11/2009 | |
dc.source.conferencelocation | Boston, MA USA | |
imec.availability | Published - imec | |
imec.internalnotes | MRS Symsposium Proceedings; Vol. 1194 | |