Show simple item record

SiGe SEG growth for buried channel p-MOS devices

dc.contributor.authorHikavyy, Andriy
dc.contributor.authorLoo, Roger
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorTakeoka, Shinji
dc.contributor.authorGeypen, Jef
dc.contributor.authorBrijs, Bert
dc.contributor.authorMerckling, Clement
dc.contributor.authorCaymax, Matty
dc.contributor.authorDekoster, Johan
dc.date.accessioned2021-10-17T22:55:10Z
dc.date.available2021-10-17T22:55:10Z
dc.date.issued2009-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15479
dc.sourceIIOimport
dc.titleSiGe SEG growth for buried channel p-MOS devices
dc.typeProceedings paper
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorGeypen, Jef
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorDekoster, Johan
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage201
dc.source.endpage210
dc.source.conferenceULSI Process Integration 6
dc.source.conferencedate4/10/2009
dc.source.conferencelocationVienna Austria
imec.availabilityPublished - open access
imec.internalnotesECS Transactions; Vol. 25, issue 7


Files in this item

Thumbnail
Name:
18833.pdf
Size:
544.3Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record