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Perspectives on technological opportunities and challenges of multi-gate non-planar device

dc.contributor.authorHoffmann, Thomas Y.
dc.date.accessioned2021-10-17T22:55:55Z
dc.date.available2021-10-17T22:55:55Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15482
dc.sourceIIOimport
dc.titlePerspectives on technological opportunities and challenges of multi-gate non-planar device
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.conferenceInternational Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and Modeling
dc.source.conferencedate26/04/2009
dc.source.conferencelocationNapa, CA USA
imec.availabilityPublished - imec


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