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Strain measurements in transistors by dark-field holography
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Authors
Hue, Florent
;
Houdellier, F.
;
Bender, Hugo
;
Snoeck, E.
;
Hytch, M.J.
Conference
Microscopy of Semiconducting Materials MSM XVI
Title
Strain measurements in transistors by dark-field holography
Publication type
Oral presentation
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