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Hetero Ge/SI and Si1-xGex/Si nanowires for vertical microelectronics devices

dc.contributor.authorIacopi, Francesca
dc.contributor.authorRooyackers, Rita
dc.contributor.authorVandooren, Anne
dc.contributor.authorVanherle, Wendy
dc.contributor.authorTakeuchi, Shotaro
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorLoo, Roger
dc.contributor.authorMilenin, Alexey
dc.contributor.authorLeonelli, Daniele
dc.contributor.authorArstila, Kai
dc.contributor.authorBender, Hugo
dc.contributor.authorCaymax, Matty
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-17T23:06:46Z
dc.date.available2021-10-17T23:06:46Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15523
dc.sourceIIOimport
dc.titleHetero Ge/SI and Si1-xGex/Si nanowires for vertical microelectronics devices
dc.typeProceedings paper
dc.contributor.imecauthorVandooren, Anne
dc.contributor.imecauthorVanherle, Wendy
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorMilenin, Alexey
dc.contributor.imecauthorLeonelli, Daniele
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecVandooren, Anne::0000-0002-2412-0176
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecMilenin, Alexey::0000-0003-0747-0462
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conference19th Symposium of MRS-Japan
dc.source.conferencedate7/12/2009
dc.source.conferencelocationYokohama Japan
imec.availabilityPublished - open access


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