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Diamond bit cutting as alternative to polymer patterning for 3D interconnections technologies

dc.contributor.authorIker, Francois
dc.contributor.authorFunaya, Takuo
dc.contributor.authorCotrin Teixeira, Ricardo
dc.contributor.authorRuythooren, Wouter
dc.date.accessioned2021-10-17T23:07:01Z
dc.date.available2021-10-17T23:07:01Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15524
dc.sourceIIOimport
dc.titleDiamond bit cutting as alternative to polymer patterning for 3D interconnections technologies
dc.typeProceedings paper
dc.contributor.imecauthorRuythooren, Wouter
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1284
dc.source.endpage1288
dc.source.conference59th Electronic Components and Technology Conference - ECTC
dc.source.conferencedate26/05/2009
dc.source.conferencelocationSan Diego, Ca USA
imec.availabilityPublished - open access


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