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The influence of methane on the boron incorporation in B-doped nanocrystalline diamond films
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Authors
Janssens, S.D.
;
Pobedinskas, P.
;
Mortet, Vincent
;
Haenen, Ken
;
Wagner, Patrick
Conference
20th European Conference on Diamond, Diamond-like Materials, Carbon Nanotubes, and Nitrides
Title
The influence of methane on the boron incorporation in B-doped nanocrystalline diamond films
Publication type
Oral presentation
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