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Laser lift-off transfer of AlGaN/GaN HEMTs from sapphire onto Si: A thermal perspective
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Authors
Ji, Hangfeng
;
Das, Jo
;
Germain, Marianne
;
Kuball, Martin
ISSN
0038-1101
Journal
Solid-State Electronics
Volume
53
Title
Laser lift-off transfer of AlGaN/GaN HEMTs from sapphire onto Si: A thermal perspective
Publication type
Journal article
Embargo date
9999-12-31
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