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Influence of capping layer deterioration on printing performance as estimated from simulation

dc.contributor.authorJonckheere, Rik
dc.date.accessioned2021-10-17T23:12:30Z
dc.date.available2021-10-17T23:12:30Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15544
dc.sourceIIOimport
dc.titleInfluence of capping layer deterioration on printing performance as estimated from simulation
dc.typeProceedings paper
dc.contributor.imecauthorJonckheere, Rik
dc.contributor.orcidimecJonckheere, Rik::0000-0003-2211-9443
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceEUV Mask Cleaning Workshop
dc.source.conferencedate14/09/2009
dc.source.conferencelocationMonterey, CA USA
imec.availabilityPublished - open access
imec.internalnotese-proceedings Sematech website


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