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Review of FINFET technology

dc.contributor.authorJurczak, Gosia
dc.contributor.authorCollaert, Nadine
dc.contributor.authorVeloso, Anabela
dc.contributor.authorHoffmann, Thomas Y.
dc.contributor.authorBiesemans, Serge
dc.date.accessioned2021-10-17T23:15:11Z
dc.date.available2021-10-17T23:15:11Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15554
dc.sourceIIOimport
dc.titleReview of FINFET technology
dc.typeProceedings paper
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.source.peerreviewno
dc.source.beginpage5
dc.source.endpage8
dc.source.conferenceIEEE International SOI Conference
dc.source.conferencedate5/10/2009
dc.source.conferencelocationFoster City, CA USA
imec.availabilityPublished - imec
imec.internalnotesplenary talk


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