dc.contributor.author | Kalicinski, Stanislaw | |
dc.contributor.author | Tilmans, Harrie | |
dc.contributor.author | Wevers, Martine | |
dc.contributor.author | De Wolf, Ingrid | |
dc.date.accessioned | 2021-10-17T23:18:39Z | |
dc.date.available | 2021-10-17T23:18:39Z | |
dc.date.issued | 2009 | |
dc.identifier.issn | 0924-4247 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15567 | |
dc.source | IIOimport | |
dc.title | A new characterization method for electrostatically actuated resonant MEMS: determination of the mechanical resonance frequency, quality factor and dielectric charging | |
dc.type | Journal article | |
dc.contributor.imecauthor | Tilmans, Harrie | |
dc.contributor.imecauthor | De Wolf, Ingrid | |
dc.contributor.orcidimec | Tilmans, Harrie::0000-0003-4240-4962 | |
dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 304 | |
dc.source.endpage | 315 | |
dc.source.journal | Sensors and Actuators A: Physical | |
dc.source.issue | 2 | |
dc.source.volume | 154 | |
imec.availability | Published - open access | |