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A new characterization method for electrostatically actuated resonant MEMS: determination of the mechanical resonance frequency, quality factor and dielectric charging

dc.contributor.authorKalicinski, Stanislaw
dc.contributor.authorTilmans, Harrie
dc.contributor.authorWevers, Martine
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-17T23:18:39Z
dc.date.available2021-10-17T23:18:39Z
dc.date.issued2009
dc.identifier.issn0924-4247
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15567
dc.sourceIIOimport
dc.titleA new characterization method for electrostatically actuated resonant MEMS: determination of the mechanical resonance frequency, quality factor and dielectric charging
dc.typeJournal article
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage304
dc.source.endpage315
dc.source.journalSensors and Actuators A: Physical
dc.source.issue2
dc.source.volume154
imec.availabilityPublished - open access


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