Authors

Kalicinski, Stanislaw; Tilmans, Harrie; Wevers, Martine; De Wolf, Ingrid

ISSN

0924-4247

Issue

2

Journal

Sensors and Actuators A: Physical

Volume

154

Title

A new characterization method for electrostatically actuated resonant MEMS: determination of the mechanical resonance frequency, quality factor and dielectric charging

Publication type

Journal article

Embargo date

9999-12-31