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A new characterization method for electrostatically actuated resonant MEMS: determination of the mechanical resonance frequency, quality factor and dielectric charging

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1916 since deposited on 2021-10-17
1last month
Acq. date: 2026-02-24

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1916 since deposited on 2021-10-17
1last month
Acq. date: 2026-02-24

Citations