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MEMS-based aluminum nitride piezoelectric energy harvesting module

dc.contributor.authorKamel, Talal
dc.contributor.authorElfrink, Rene
dc.contributor.authorHohlfeld, Dennis
dc.contributor.authorGoedbloed, Martijn
dc.contributor.authorvan Andel, Yvonne
dc.contributor.authorde Nooijer, Christine
dc.contributor.authorJambunathan, Madhusudhanan
dc.contributor.authorvan Schaijk, Rob
dc.date.accessioned2021-10-17T23:18:56Z
dc.date.available2021-10-17T23:18:56Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15568
dc.sourceIIOimport
dc.titleMEMS-based aluminum nitride piezoelectric energy harvesting module
dc.typeProceedings paper
dc.contributor.imecauthorElfrink, Rene
dc.contributor.imecauthorde Nooijer, Christine
dc.source.peerreviewno
dc.source.conferenceSmart Systems Integration
dc.source.conferencedate10/03/2009
dc.source.conferencelocationBrussels Belgium
imec.availabilityPublished - imec


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