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TEM sample preparation by FIB for carbon nanotube interconnects

dc.contributor.authorKe, Xiaoxing
dc.contributor.authorBals, Sara
dc.contributor.authorRomo Negreira, Ainhoa
dc.contributor.authorHantschel, Thomas
dc.contributor.authorBender, Hugo
dc.contributor.authorVan Tendeloo, Gustaaf
dc.date.accessioned2021-10-17T23:22:24Z
dc.date.available2021-10-17T23:22:24Z
dc.date.issued2009
dc.identifier.issn0304-3991
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15580
dc.sourceIIOimport
dc.titleTEM sample preparation by FIB for carbon nanotube interconnects
dc.typeJournal article
dc.contributor.imecauthorRomo Negreira, Ainhoa
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorBender, Hugo
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewyes
dc.source.beginpage1353
dc.source.endpage1359
dc.source.journalUltramicroscopy
dc.source.issue11
dc.source.volume109
imec.availabilityPublished - imec


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