TEM sample preparation by FIB for carbon nanotube interconnects

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Authors

Ke, Xiaoxing; Bals, Sara; Romo Negreira, Ainhoa; Hantschel, Thomas; Bender, Hugo; Van Tendeloo, Gustaaf

ISSN

0304-3991

Issue

11

Journal

Ultramicroscopy

Volume

109

Title

TEM sample preparation by FIB for carbon nanotube interconnects

Publication type

Journal article

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