Authors

Kesters, Els; Le, Quoc Toan; Lux, Marcel; Baerts, Christina; Onandia, Laura; Vereecke, Guy

Conference

Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 11

Title

Influence of UV irradiation on the removal of post-etch photoresist in porous low-k dielectric patterning

Publication type

Proceedings paper

Embargo date

9999-12-31