Authors

Kesters, Els; Le, Quoc Toan; Lux, Marcel; Onandia, Laura; Baerts, Christina; Vereecke, Guy

Conference

216th ECS Meeting

Title

Influence of UV irradiation on the removal of post-etch photoresist in porous low-k dielectric patterning

Publication type

Meeting abstract

Embargo date

9999-12-31