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Quantitative depth profiling of SiGe-multilayers with the atomprobe

dc.contributor.authorKoelling, Sebastian
dc.contributor.authorGilbert, Matthieu
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-17T23:33:40Z
dc.date.available2021-10-17T23:33:40Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15617
dc.sourceIIOimport
dc.titleQuantitative depth profiling of SiGe-multilayers with the atomprobe
dc.typeMeeting abstract
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceSIMS XVII
dc.source.conferencedate14/09/2009
dc.source.conferencelocationToronto Canada
imec.availabilityPublished - open access


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