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Shrinking solid-state nanopores and nanoslits using electron beam induced deposition with different precursors

dc.contributor.authorKox, Ronald
dc.contributor.authorChen, Chang
dc.contributor.authorLagae, Liesbet
dc.contributor.authorBorghs, Gustaaf
dc.date.accessioned2021-10-17T23:35:07Z
dc.date.available2021-10-17T23:35:07Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15622
dc.sourceIIOimport
dc.titleShrinking solid-state nanopores and nanoslits using electron beam induced deposition with different precursors
dc.typeProceedings paper
dc.contributor.imecauthorLagae, Liesbet
dc.contributor.imecauthorBorghs, Gustaaf
dc.source.peerreviewno
dc.source.conferenceIEEE NANO Proceedings
dc.source.conferencedate26/07/2009
dc.source.conferencelocationGenoa Italy
imec.availabilityPublished - imec


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