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Effect of energetic ions on plasma damage of SiCOH low-k material
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Authors
Kunnen, Eddy
;
Urbanowicz, Adam
;
Franquet, Alexis
;
Shamiryan, Denis
;
Struyf, Herbert
;
Boullart, Werner
;
Baklanov, Mikhaïl
Conference
AVS 56th International Symposium and Exhibition
Title
Effect of energetic ions on plasma damage of SiCOH low-k material
Publication type
Proceedings paper
Embargo date
9999-12-31
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