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Articles
Modification of photoresist by UV for post-etch wet strip applications
Publication:
Modification of photoresist by UV for post-etch wet strip applications
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Date
2009
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Le, Quoc Toan
;
Kesters, Els
;
Prager, Lutz
;
Claes, Martine
;
Lux, Marcel
;
Vereecke, Guy
Journal
Solid State Phenomena
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1891
since deposited on 2021-10-17
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Acq. date: 2025-12-11
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Metrics
Views
1891
since deposited on 2021-10-17
2
last month
Acq. date: 2025-12-11
Citations