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Surface cleaning and preparation in microelectronics

dc.contributor.authorLe, Quoc Toan
dc.contributor.authorVereecke, Guy
dc.contributor.authorKesters, Els
dc.contributor.authorLeunissen, Peter
dc.date.accessioned2021-10-17T23:52:52Z
dc.date.available2021-10-17T23:52:52Z
dc.date.issued2009-11
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15684
dc.sourceIIOimport
dc.titleSurface cleaning and preparation in microelectronics
dc.typeProceedings paper
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorKesters, Els
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.source.peerreviewno
dc.source.conferenceInternational Workshop on Nanotechnology and Application
dc.source.conferencedate12/11/2009
dc.source.conferencelocationVung Tau Viet Nam
imec.availabilityPublished - imec


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