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Selective organic functionalization of polycrystalline silicon-germanium for bioMEMS applications
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Authors
Lenci, Silvia
;
Caponigri, Irene
;
Lande, Caterina
;
Nannini, Andrea
;
Pennelli, Giovanni
;
Pieri, Francesco
;
Severi, Simone
;
Tedeschi, Lorena
ISSN
1876-6196
Issue
1
Journal
Procedia Chemistry
Volume
1
Title
Selective organic functionalization of polycrystalline silicon-germanium for bioMEMS applications
Publication type
Journal article
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