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Selective organic functionalization of polycrystalline silicon-germanium for bioMEMS applications

dc.contributor.authorLenci, Silvia
dc.contributor.authorCaponigri, Irene
dc.contributor.authorLande, Caterina
dc.contributor.authorNannini, Andrea
dc.contributor.authorPennelli, Giovanni
dc.contributor.authorPieri, Francesco
dc.contributor.authorSeveri, Simone
dc.contributor.authorTedeschi, Lorena
dc.date.accessioned2021-10-17T23:53:46Z
dc.date.available2021-10-17T23:53:46Z
dc.date.issued2009
dc.identifier.issn1876-6196
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15687
dc.sourceIIOimport
dc.titleSelective organic functionalization of polycrystalline silicon-germanium for bioMEMS applications
dc.typeJournal article
dc.contributor.imecauthorLenci, Silvia
dc.contributor.imecauthorSeveri, Simone
dc.source.peerreviewno
dc.source.beginpage252
dc.source.endpage255
dc.source.journalProcedia Chemistry
dc.source.issue1
dc.source.volume1
imec.availabilityPublished - imec


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