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Combined effect of high temperature annealing and hydrogenation of a deposited silicon oxide for silicon surface passivation

dc.contributor.authorLoozen, Xavier
dc.contributor.authorJivanescu, M.
dc.contributor.authorStesmans, Andre
dc.contributor.authorChoulat, Patrick
dc.contributor.authorJohn, Joachim
dc.contributor.authorConard, Thierry
dc.contributor.authorFranquet, Alexis
dc.contributor.authorBeaucarne, Guy
dc.contributor.authorVan Kerschaver, Emmanuel
dc.date.accessioned2021-10-18T00:11:51Z
dc.date.available2021-10-18T00:11:51Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15746
dc.sourceIIOimport
dc.titleCombined effect of high temperature annealing and hydrogenation of a deposited silicon oxide for silicon surface passivation
dc.typeProceedings paper
dc.contributor.imecauthorStesmans, Andre
dc.contributor.imecauthorChoulat, Patrick
dc.contributor.imecauthorJohn, Joachim
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1609
dc.source.endpage1612
dc.source.conference24th European Photovoltaic Solar Energy Conference and Exhibition - EPVSEC
dc.source.conferencedate21/09/2009
dc.source.conferencelocationHamburg Germany
imec.availabilityPublished - open access


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