Influence of thermal anneal steps on the current collapse of Fluorine treated enhancement mode SiN/AlGaN/GaN HEMTs
dc.contributor.author | Lorenz, Anne | |
dc.contributor.author | Derluyn, Joff | |
dc.contributor.author | Das, Jo | |
dc.contributor.author | Cheng, Kai | |
dc.contributor.author | Degroote, Stefan | |
dc.contributor.author | Medjdoub, Farid | |
dc.contributor.author | Germain, Marianne | |
dc.contributor.author | Borghs, Gustaaf | |
dc.date.accessioned | 2021-10-18T00:13:18Z | |
dc.date.available | 2021-10-18T00:13:18Z | |
dc.date.issued | 2009 | |
dc.identifier.issn | 1610-1634 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15751 | |
dc.source | IIOimport | |
dc.title | Influence of thermal anneal steps on the current collapse of Fluorine treated enhancement mode SiN/AlGaN/GaN HEMTs | |
dc.type | Journal article | |
dc.contributor.imecauthor | Borghs, Gustaaf | |
dc.source.peerreview | yes | |
dc.source.beginpage | S996 | |
dc.source.endpage | S998 | |
dc.source.journal | Physica Status Solidi C | |
dc.source.issue | S2 | |
dc.source.volume | 6 | |
dc.identifier.url | http://www3.interscience.wiley.com/journal/122254958/abstract | |
imec.availability | Published - imec |
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