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Influence of thermal anneal steps on the current collapse of Fluorine treated enhancement mode SiN/AlGaN/GaN HEMTs
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Authors
Lorenz, Anne
;
Derluyn, Joff
;
Das, Jo
;
Cheng, Kai
;
Degroote, Stefan
;
Medjdoub, Farid
;
Germain, Marianne
;
Borghs, Gustaaf
ISSN
1610-1634
Issue
S2
Journal
Physica Status Solidi C
Volume
6
Title
Influence of thermal anneal steps on the current collapse of Fluorine treated enhancement mode SiN/AlGaN/GaN HEMTs
Publication type
Journal article
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