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First electrical demonstration of DRAM compatible Ni silicides

dc.contributor.authorMachkaoutsan, Vladimir
dc.contributor.authorBauer, Matthias
dc.contributor.authorZhang, Y.
dc.contributor.authorKoelling, Sebastian
dc.contributor.authorFranquet, Alexis
dc.contributor.authorVanormelingen, Koen
dc.contributor.authorVerheyen, Peter
dc.contributor.authorLoo, Roger
dc.contributor.authorKim, Chul Sung
dc.contributor.authorLauwers, Anne
dc.contributor.authorHoffmann, Thomas Y.
dc.contributor.authorAbsil, Philippe
dc.contributor.authorGranneman, Ernst
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorThomas, Shawn. G
dc.date.accessioned2021-10-18T00:20:34Z
dc.date.available2021-10-18T00:20:34Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15775
dc.sourceIIOimport
dc.titleFirst electrical demonstration of DRAM compatible Ni silicides
dc.typeOral presentation
dc.contributor.imecauthorMachkaoutsan, Vladimir
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorLauwers, Anne
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewno
dc.source.conference18th Workshop Materials for Advanced Metallization - MAM
dc.source.conferencedate8/03/2009
dc.source.conferencelocationGrenoble France
imec.availabilityPublished - imec


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