Authors

MacLaren, I.; Ras, T.; MacKenzie, M.; Craven, A.J.; McComb, D.W.; De Gendt, Stefan

ISSN

0013-4651

Issue

8

Journal

Journal of the Electrochemical Society

Volume

156

Title

Texture, twinning and metastable "tetragonal" phase in ultrathin films of HfO2 on a Si substrate

Publication type

Journal article

Embargo date

9999-12-31