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Texture, twinning and metastable "tetragonal" phase in ultrathin films of HfO2 on a Si substrate

dc.contributor.authorMacLaren, I.
dc.contributor.authorRas, T.
dc.contributor.authorMacKenzie, M.
dc.contributor.authorCraven, A.J.
dc.contributor.authorMcComb, D.W.
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-18T00:20:53Z
dc.date.available2021-10-18T00:20:53Z
dc.date.issued2009
dc.identifier.issn0013-4651
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15776
dc.sourceIIOimport
dc.titleTexture, twinning and metastable "tetragonal" phase in ultrathin films of HfO2 on a Si substrate
dc.typeJournal article
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageG103
dc.source.endpageG108
dc.source.journalJournal of the Electrochemical Society
dc.source.issue8
dc.source.volume156
imec.availabilityPublished - open access


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