Band edge work function metal gates using PEALD TaCN electrodes

Thumbnail
Metadata
Show full item record
Authors
Maes, Jan; Swerts, Johan; Pierreux, Dieter; Machkaoutsan, Vladimir; Marcus, Steven; Milligan, Brennan; Schram, Tom; Ragnarsson, Lars-Ake; Cacciato, Antonio; Rohr, Erika; Rothschild, Aude; Hendrickx, Paul; Breuil, Laurent; Van den Bosch, Geert
Conference
9th International Conference on Atomic Layer Deposition - ALD
Title
Band edge work function metal gates using PEALD TaCN electrodes
Publication type
Oral presentation
Collections