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Molecular engineering of surfaces for future device architectures using SAMs

dc.contributor.authorMaestre Caro, Arantxa
dc.contributor.authorWhelan, Caroline
dc.date.accessioned2021-10-18T00:23:18Z
dc.date.available2021-10-18T00:23:18Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15784
dc.sourceIIOimport
dc.titleMolecular engineering of surfaces for future device architectures using SAMs
dc.typeOral presentation
dc.source.peerreviewno
dc.source.conferenceMRS Spring Meeting Symspoium D: Materials, Processes and Reliability for Advanced Interconnects for Micro- and Nanoelectronics
dc.source.conferencedate13/04/2009
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec


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