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Radiation hardness of Al(x)Ga(1-x)N photodetectors exposed to Extreme UltraViolet (EUV) light beam

dc.contributor.authorMalinowski, Pawel
dc.contributor.authorJohn, Joachim
dc.contributor.authorLorenz, Anne
dc.contributor.authorCheng, Kai
dc.contributor.authorDerluyn, Joff
dc.contributor.authorGermain, Marianne
dc.contributor.authorDe Moor, Piet
dc.contributor.authorMinoglou, Kiki
dc.contributor.authorBarkusky, Frank
dc.contributor.authorBayer, Armin
dc.contributor.authorMann, Klaus
dc.contributor.authorDuboz, Jean-Yves
dc.contributor.authorSemond, Fabrice
dc.contributor.authorHochedez, Jean-Francois
dc.contributor.authorGiordanengo, Boris
dc.contributor.authorBorghs, Gustaaf
dc.contributor.authorMertens, Robert
dc.date.accessioned2021-10-18T00:26:48Z
dc.date.available2021-10-18T00:26:48Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15794
dc.sourceIIOimport
dc.titleRadiation hardness of Al(x)Ga(1-x)N photodetectors exposed to Extreme UltraViolet (EUV) light beam
dc.typeProceedings paper
dc.contributor.imecauthorMalinowski, Pawel
dc.contributor.imecauthorJohn, Joachim
dc.contributor.imecauthorDe Moor, Piet
dc.contributor.imecauthorBorghs, Gustaaf
dc.contributor.imecauthorMertens, Robert
dc.contributor.orcidimecMalinowski, Pawel::0000-0002-2934-470X
dc.source.peerreviewno
dc.source.conferenceEuropean Optics & Optoelectronics Symposium
dc.source.conferencedate20/04/2009
dc.source.conferencelocationPrague Czech Republic
imec.availabilityPublished - imec


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