Single-layer SiGe infrared wide-band microemitter arrays by MEMS technology

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Authors
Malyutenko, Volodymyr; Malyutenko, Oleg; Leonov, Vladimir; Van Hoof, Chris
Conference
Micro- and Nanotechnology Sensors, Systems, and Applications
Title
Single-layer SiGe infrared wide-band microemitter arrays by MEMS technology
Publication type
Proceedings paper
Embargo date
9999-12-31
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