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dc.contributor.authorMayer, M.
dc.contributor.authorArstila, Kai
dc.contributor.authorvon Toussaint, U.
dc.date.accessioned2021-10-18T00:42:31Z
dc.date.available2021-10-18T00:42:31Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15845
dc.sourceIIOimport
dc.titleSkewness of energy straggling distributions
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.conference19th Ion Beam Analysis Conference - IBA
dc.source.conferencedate7/09/2009
dc.source.conferencelocationCambridge UK
imec.availabilityPublished - imec


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