Authors

Merckling, Clement; Penaud, Julien; Bellenger, Florence; Kohen, David; Brammertz, Guy; Alian, AliReza; Pourtois, Geoffrey; Scarrozza, Marco; Houssa, Michel; El-Kazzi, Mario; Dekoster, Johan; Caymax, Matty; Meuris, Marc; Heyns, Marc

Conference

CMOS Gate Stack Scaling. Materials, Interfaces, and Reliability

Title

Molecular Beam Epitaxy study of a common a-GeO2 interfacial passivation layer for Ge- and GaAs-based MOS heterostructures

Publication type

Proceedings paper