Molecular beam epitaxy passivation studies of Ge and III-V semiconductors for advanced CMOS

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Authors

Merckling, Clement; Penaud, Julien; Kohen, David; Bellenger, Florence; Alian, AliReza; Brammertz, Guy; El-Kazzi, Mario; Houssa, Michel; Dekoster, Johan; Caymax, Matty; Meuris, Marc; Heyns, Marc

ISSN

0167-9317

Issue

7_9

Journal

Microelectronic Engineering

Volume

86

Title

Molecular beam epitaxy passivation studies of Ge and III-V semiconductors for advanced CMOS

Publication type

Journal article

Embargo date

9999-12-31

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