Publication:

Molecular beam epitaxy passivation studies of Ge and III-V semiconductors for advanced CMOS

Date

2009
Journal article
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Author(s)

Merckling, Clement  
;
Penaud, Julien
;
Kohen, David
;
Bellenger, Florence
;
Alian, AliReza  
;
Brammertz, Guy  
;
El-Kazzi, Mario
;
Houssa, Michel  
;
Dekoster, Johan  
;
Caymax, Matty  
;
Meuris, Marc  
;
Heyns, Marc  

Journal

Microelectronic Engineering

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